Physics Facilities — Plasma Lab

Our department offers undergraduate students the opportunity to work in the Plasma Research Laboratory during their junior and/or senior year.  The laboratory focuses on plasma etching of materials using a commercial grade plasma etching system from Plasma Etch, Inc.  Students working in the lab have the opportunity to explore the various facets of this process by concentrating in one of the following areas: plasma-surface effects for different types of anodized and un-anodized metals, optical emission spectroscopy of plasmas during the etching, effects of surface preparation on the plasma etching process, and effect of RF frequency on the plasma properties

lab 1

Corrosive Gas Cabin and Fume Hood


Plasma Etcher